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发明名称
CVD ELECTRODE
摘要
申请公布号
JPH02200784(A)
申请公布日期
1990.08.09
申请号
JP19890020269
申请日期
1989.01.30
申请人
KOUJIYUNDO KAGAKU KENKYUSHO:KK
发明人
HOCHIDO YUKO;FUTAKI TAKEHIKO;YOKOYAMA HIDECHIKA
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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