| 摘要 |
PURPOSE:To improve productivity of ceramic substrate by calcining ceramic green sheets at a temperature lower than a given calcining temperature, alternately piling the sheets and small setters having low reactivity, laminating at multiple stages and calcining at the given calcining temperature. CONSTITUTION:About 20 sheets of green sheets such as SrTiO3-CaTiO-based dielectric ceramic having about 0.3 to 0.5mm thickness are piled and calcined at about 1,240 deg.C, lower than a characteristic calcining temperature for about 2 hours. Then the primarily calcined substrates 11 and setters 12 made of high- purity Al2O3 flat plates having about 0.5 to 1.0mm thickness are alternately piled and properly calcined to give dielectric substrates having flat and smooth surface. When substrates which are prepared by calcining sheets having the same composition as that of the dielectric ceramic at about 1,350 deg.C, higher than the proper calcining temperature and flattening are used as the setters 12, dielectric substrates similarly having flat and smooth surface are obtained. |
