| 摘要 |
<p>PURPOSE:To enable production of an insulator having less defects within a short time at a low cost by limiting a width of a projecting section of a wiring section a lower electrode layer at most to a specified value and by carrying out anodic oxidation leaving a resist used for patterning. CONSTITUTION:A wiring section having a projecting section 4 is connected to a pad section 1 of a lower electrode layer formed on a glass substrate to be jointed with an upper electrode layer through a lead out section 2. A width W of the projecting section 4 is made not more than about 20mum and anodic oxidation is carried out keeping a resist 12 remaining on the projecting section 4. Thereby, a side of the projecting section 4 is oxidized first, and then, oxidation proceeds to an interface between the projecting section 4 and the resist 12. When oxidation further proceeds, the resist 12 peels off from the projecting section 4 due to an oxide film 14 formed on the interface, thereby forming an insulator layer all over by an anodic oxidation film. Accordingly, an oxide film having less defects can be produced at a low cost with a short process and time.</p> |
