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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0395972(A)
申请公布日期
1991.04.22
申请号
JP19890231752
申请日期
1989.09.08
申请人
FUJITSU LTD
发明人
MUKAI RYOICHI;TAKEI MICHIKO
分类号
H01L21/205;H01L29/80
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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