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发明名称
VORRICHTUNG ZUR CHEMISCHEN METALLORGANISCHEN GASABSCHEIDUNG ZUM WACHSEN EINER EPITAXIALEN HALBLEITERVERBINDUNGSSCHICHT.
摘要
申请公布号
DE3678760(D1)
申请公布日期
1991.05.23
申请号
DE19863678760
申请日期
1986.07.18
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
KASAI, KAZUMI, ATSUGI-SHI KANAGAWA 243, JP;ITOH, HIROMI, KAWASAKI-SHI KANAGAWA 215, JP;TANAKA, HITOSHI;OH-HORI, TATSUYA, SAGAMIHARA-SHI KANAGAWA 228, JP;KOMENO, JUNJI, FUJISAWA-SHI KANAGAWA 251, JP
分类号
H01L21/205;C30B25/08;H01L21/383;(IPC1-7):C30B25/08
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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