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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03131020(A)
申请公布日期
1991.06.04
申请号
JP19890270057
申请日期
1989.10.16
申请人
SANYO ELECTRIC CO LTD
发明人
NISHIDA ATSUHIRO;MAMENO KAZUNOBU
分类号
H01L29/78;H01L21/265
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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