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发明名称
DRY ETCHING APPARATUS
摘要
申请公布号
KR910009321(B1)
申请公布日期
1991.11.09
申请号
KR19880009898
申请日期
1988.08.03
申请人
MATSUSHIDA ELECTRIC IND. CO. LTD.
发明人
DOMIDA GASYUKI;TANNO MASUO;DANAKA YASUO
分类号
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
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代理人
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