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发明名称
MANUFACTURING FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04288833(A)
申请公布日期
1992.10.13
申请号
JP19910052780
申请日期
1991.03.18
申请人
FUJITSU LTD
发明人
INAGAKI TAKU
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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