发明名称 |
Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers |
摘要 |
A resistive heating element is formed by depositing an amorphous silicon film on selected portions of a substrate and heating the deposited amorphous silicon film so that it undergoes solid phase epitaxy to form a (111) textured polycrystalline silicon film. The method is particularly useful for forming electro-thermal transducers for thermal ink jet printheads.
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申请公布号 |
US5169806(A) |
申请公布日期 |
1992.12.08 |
申请号 |
US19900589788 |
申请日期 |
1990.09.26 |
申请人 |
XEROX CORPORATION |
发明人 |
HAWKINS, WILLIAM G.;MULLER, OLAF |
分类号 |
B41J2/05;B41J2/14;B41J2/16;H01L21/822;H01L27/04 |
主分类号 |
B41J2/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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