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经营范围
发明名称
SILICIDE TARGET FOR SPUTTERING AND ITS PRODUCTION
摘要
申请公布号
JPH051370(A)
申请公布日期
1993.01.08
申请号
JP19910035287
申请日期
1991.02.05
申请人
NIKKO KYODO CO LTD
发明人
SAWADA SUSUMU;KOTANI YASUHIRO;KATO YOSHIHARU;HAMAZAKI MASAYUKI;KANANO OSAMU;FUJIOKA MASAAKI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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