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发明名称
PROCESS FOR FORMING DEPOSITED FILM BY USE OF ALKYL ALUMINUM HYDRIDE
摘要
申请公布号
US5179042(A)
申请公布日期
1993.01.12
申请号
US19900578672
申请日期
1990.09.07
申请人
CANON KABUSHIKI KAISHA
发明人
MIKOSHIBA, NOBUO;TSUBOUCHI, KAZUO;MASU, KAZUYA
分类号
C23C16/20;H01L21/285
主分类号
C23C16/20
代理机构
代理人
主权项
地址
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