发明名称 PROCESS FOR FORMING A Ti-B-N-COATING ON A SUBSTRATE BY SPUTTERING
摘要 A process is disclosed for forming a Ti-BN-coating on a substrate by sputtering. The substrate is coated by simultaneously sputtering from at least one Ti-target and at least one BN-target.
申请公布号 WO9303195(A1) 申请公布日期 1993.02.18
申请号 WO1992EP01757 申请日期 1992.08.03
申请人 EUROPAEISCHE WIRTSCHAFTSGEMEINSCHAFT (EWG) 发明人 FRIESEN, THOMAS;HAUPT, JUSTUS;GISSLER, WOLFRAM
分类号 C23C14/06 主分类号 C23C14/06
代理机构 代理人
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