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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0541513(A)
申请公布日期
1993.02.19
申请号
JP19910194518
申请日期
1991.08.02
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KUWATA NOBUCHIKA
分类号
H01L29/41;H01L21/338;H01L29/812
主分类号
H01L29/41
代理机构
代理人
主权项
地址
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