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发明名称
Process for preparing silicon nitride.
摘要
申请公布号
EP0442032(B1)
申请公布日期
1994.05.04
申请号
EP19900116511
申请日期
1990.08.28
申请人
NORTON COMPANY
发明人
WILLKENS, CRAIG W.;HARTLINE, STEPHEN D.;ARSENAULT, NORMAND P.
分类号
C01B21/068;(IPC1-7):C01B21/068
主分类号
C01B21/068
代理机构
代理人
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地址
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