DRAWING DEVICE BY CHARGED PARTICLE,申请号JP19920271558-传众专利搜索

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发明名称	DRAWING DEVICE BY CHARGED PARTICLE
摘要
申请公布号	JPH06124681(A)	申请公布日期	1994.05.06
申请号	JP19920271558	申请日期	1992.10.09
申请人	NEC CORP	发明人	SUGANO HIKARI
分类号	H01J37/147;H01J37/28;H01J37/305;H01L21/027;(IPC1-7):H01J37/28	主分类号	H01J37/147
代理机构		代理人
主权项
地址

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