| 摘要 |
PROBLEM TO BE SOLVED: To reduce pulsed laser beam profile non-uniformity for laser annealing.SOLUTION: The methods include directing an initial pulsed laser beam along an optical axis, and imparting to each light pulse a time-varying angular deflection relative to the optical axis. This forms a new laser beam, and each light pulse is deflected by an amount of spatial deflection δ sufficient to reduce the micro-scale intensity variations in the laser beam. The new laser beam is then used to form a line image, which has better intensity uniformity than a line image formed using the initial laser beam.SELECTED DRAWING: None |
