| 摘要 |
<p>A surface-emitting laser system includes a laser (2) that emits a vertically divergent beam (20) generally parallel to the substrate (4) on which it is formed, and a turning mirror (18') in the path of the beam (20) that extends up from the substrate (4) to a level well above the laser height. The extended mirror area (24) reflects a greater portion of the beam (20) than prior planar designs, increasing the output efficiency and providing a smoother beam pattern. One fabrication method employs a masking and ion beam milling technique that uses an accumulation of redeposited material to form the additional mirror area, with a thick mask layer that is later removed guiding the redeposition. An alternate fabrication method involves epitaxial growth of an additional layer of material above the conventional laser epilayers, with the additional layer being subsequently removed from the laser region but retained in the mirror region. <IMAGE></p> |
