发明名称 |
Exposure device and exposure method |
摘要 |
An exposure device and an exposure method are provided. The exposure device includes an exposure lamp, a mask plate and a marking equipment. The marking equipment includes a guide rail frame disposed on the mask plate, and at least one marking vehicle disposed on the guide rail frame, a controller. The controller acts to make the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp under its control, and to make the marking vehicle lie in a corresponding marking location by dint of its control, for displaying a corresponding marking identification. |
申请公布号 |
US9523920(B2) |
申请公布日期 |
2016.12.20 |
申请号 |
US201314386245 |
申请日期 |
2013.12.09 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
Ma Haitao;Zhao Haisheng |
分类号 |
G03B27/62;G03B27/42;G03F7/20 |
主分类号 |
G03B27/62 |
代理机构 |
Ladas & Parry LLP |
代理人 |
Ladas & Parry LLP |
主权项 |
1. An exposure device, comprising: an exposure lamp, a mask plate and a marking equipment, the marking equipment comprising:
a guide rail frame, disposed on the mask plate; at least one marking vehicle, disposed on the guide rail frame; a controller, configured to control the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp, and to control the marking vehicle lie in a corresponding marking location, for displaying a corresponding marking identification. |
地址 |
Beijing CN |