发明名称 Exposure device and exposure method
摘要 An exposure device and an exposure method are provided. The exposure device includes an exposure lamp, a mask plate and a marking equipment. The marking equipment includes a guide rail frame disposed on the mask plate, and at least one marking vehicle disposed on the guide rail frame, a controller. The controller acts to make the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp under its control, and to make the marking vehicle lie in a corresponding marking location by dint of its control, for displaying a corresponding marking identification.
申请公布号 US9523920(B2) 申请公布日期 2016.12.20
申请号 US201314386245 申请日期 2013.12.09
申请人 BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 Ma Haitao;Zhao Haisheng
分类号 G03B27/62;G03B27/42;G03F7/20 主分类号 G03B27/62
代理机构 Ladas & Parry LLP 代理人 Ladas & Parry LLP
主权项 1. An exposure device, comprising: an exposure lamp, a mask plate and a marking equipment, the marking equipment comprising: a guide rail frame, disposed on the mask plate; at least one marking vehicle, disposed on the guide rail frame; a controller, configured to control the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp, and to control the marking vehicle lie in a corresponding marking location, for displaying a corresponding marking identification.
地址 Beijing CN