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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH07193048(A)
申请公布日期
1995.07.28
申请号
JP19930330673
申请日期
1993.12.27
申请人
NEC CORP
发明人
KAWAMOTO HIDEAKI
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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