FORMATION OF MINUTE CAVITY AND MINUTE DEVICE HAVING MINUTE CAVITY,申请号JP19930332727-传众专利搜索

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发明名称	FORMATION OF MINUTE CAVITY AND MINUTE DEVICE HAVING MINUTE CAVITY
摘要
申请公布号	JPH07193052(A)	申请公布日期	1995.07.28
申请号	JP19930332727	申请日期	1993.12.27
申请人	FUJITSU LTD	发明人	SUGINO SHIGEYUKI
分类号	C23F1/12;B81B1/00;B81C1/00;H01L21/302;H01L21/3065;H01L21/3213;H01L29/84;(IPC1-7):H01L21/306	主分类号	C23F1/12
代理机构		代理人
主权项
地址

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