发明名称 |
Method for forming a silane based boron phosphorous silicate planarization structure. |
摘要 |
<p>An improved process is provided for forming a highly planar BPSG interlevel dielectric. The process includes using a silane based source material placed within a plasma enhanced CVD chamber. The plasma enhanced CVD chamber undergoes high energy plasma deposition by applying an RF energy exceeding 950 watts in order to minimize formation at silicon-rich intermediates upon the semiconductor substrate. Moreover, densification of the BPSG material occurs within an oxygen ambient to enhance the formation of silicon dioxide having a flow angle substantially less than lower power, non-oxygen densified processes. Still further. BPSG can, if desired, be selectively etched to form a more planarized topography or a possibly recessed topography. Selective etching is brought about by a photolithography mask used to form the underlying conductors. <IMAGE></p> |
申请公布号 |
EP0673063(A2) |
申请公布日期 |
1995.09.20 |
申请号 |
EP19950301413 |
申请日期 |
1995.03.06 |
申请人 |
ADVANCED MICRO DEVICES INC. |
发明人 |
IBOK, EFFIONG E.;WILLIAMS, JOHN |
分类号 |
C01B33/12;C23C16/50;C23F4/00;H01L21/205;H01L21/3105;H01L21/316;H01L21/768;(IPC1-7):H01L21/768;H01L21/310 |
主分类号 |
C01B33/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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