摘要 |
A light receiving module and its manufacturing method of an excellent structure which can make a good and uniform optical couple between an optical fiber and a light receiving element, and can improve its productivity. The light receiving module comprises a semiconductor substrate, a light receiving element mounted on a surface of the semiconductor substrate, a groove formed on a back surface of the semiconductor substrate, an inclined face in the back surface side facing the light receiving element, and an optical fiber fixed in the groove. A transmitted light signal through the fiber is reflected by the inclined face. The inclined face is formed at a distal end of the optical fiber, at the closed end wall of the groove, or a side wall of a dimple arranged on the extension line of the groove. The reflected light is admitted to a light receiving face of the light receiving element, from the back surface side of the semiconductor substrate.
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