发明名称 Method of manufacturing a light receiving module with optical fiber coupling
摘要 A light receiving module and its manufacturing method of an excellent structure which can make a good and uniform optical couple between an optical fiber and a light receiving element, and can improve its productivity. The light receiving module comprises a semiconductor substrate, a light receiving element mounted on a surface of the semiconductor substrate, a groove formed on a back surface of the semiconductor substrate, an inclined face in the back surface side facing the light receiving element, and an optical fiber fixed in the groove. A transmitted light signal through the fiber is reflected by the inclined face. The inclined face is formed at a distal end of the optical fiber, at the closed end wall of the groove, or a side wall of a dimple arranged on the extension line of the groove. The reflected light is admitted to a light receiving face of the light receiving element, from the back surface side of the semiconductor substrate.
申请公布号 US5466558(A) 申请公布日期 1995.11.14
申请号 US19940280838 申请日期 1994.07.26
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 SASAKI, GORO
分类号 G02B6/36;G02B6/42;(IPC1-7):H01L21/18;G03F7/00 主分类号 G02B6/36
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