RESISTIVE GAS SENSING, ESPECIALLY FOR DETECTION OF OZONE

摘要

A resistive gas sensor having a WO3 sensing element is especially useful for detection of low concentrations (1 ppm or less) of ozone in air. The WO3 element is a porous layer (82) with 30 - 60 % porosity and less than 50 micrometre thick, having in general a sufficiently open porous microstructure and high surface area to give a satisfactory response to ozone. The sensor is used for detection of low ozone concentrations at a working temperature in the range from ambient to 600 DEG C.