Unit recovers and purifies special oil used e.g. in semiconductor mfr.

摘要

This unit recovers and/or cleans contaminated lubricating oil from saturated filter elements, using a pump, oil interception vessel, oil de-gassing device, purification filter system for gaseous and solid impurities, a monitoring device for cleaned oil quality and a filter element holder. The latter has a line abstracting contaminated lubricating oil from the elements and connects to the pump. In the novel unit, a further line (8) may be connected above the element (3) holder (2) to supply a flushing gas. The oil interceptor (9) is connected to a pressure tight vessel (14). The purification filter system for solid impurities (18) has a microfiltration filter (19) operated under pressure.