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发明名称
Deformasjonssensor som benytter den piezoresistive effekt, og fremgangsmåte til dens fremstilling
摘要
申请公布号
NO971201(D0)
申请公布日期
1997.03.14
申请号
NO19970001201
申请日期
1997.03.14
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
DIEM, BERNARD;VOILLET-BOSSON, SYLVIE;TOURET, PATRICIA
分类号
G01L1/18;G01B7/16;G01L9/00;H01L29/84;H01L41/08
主分类号
G01L1/18
代理机构
代理人
主权项
地址
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