发明名称 Beam delivery apparatus and method for interferometry using rotatable polarization chucks
摘要 A method of providing a beam having precisely orthogonally polarized components includes generating a beam with substantially orthogonally polarized components, splitting the beam to separate the components to separate paths, projecting each component into a respective polarization preserving optical fiber (PPF) or polarizing fiber, recombining the components output from the fibers into a single beam, and transmitting the single beam to an interferometer. The PPFs are rotationally adjustable at their output ends to provide precise orthogonality in the resulting beam.
申请公布号 US5648848(A) 申请公布日期 1997.07.15
申请号 US19950381734 申请日期 1995.02.01
申请人 NIKON PRECISION, INC. 发明人 AIYER, ARUN A.
分类号 G01B9/02;G02B27/28;(IPC1-7):G01B9/02 主分类号 G01B9/02
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