发明名称 Semiconductor device and method for fabricating the same
摘要 A semiconductor device includes a substrate, a plurality of memory cells, a logic gate electrode and a high-voltage gate electrode. The substrate at least includes a memory area, a high-voltage area and a logic area. The memory cells are disposed in the memory area. The logic gate electrode is disposed on the logic area. The high-voltage gate electrode has a first portion and a second portion in contact with each other and stacked on the high-voltage area. The high-voltage gate electrode has a thickness substantially greater than that of the logic gate electrode.
申请公布号 US9472562(B1) 申请公布日期 2016.10.18
申请号 US201514726984 申请日期 2015.06.01
申请人 UNITED MICROELECTRONICS CORP. 发明人 Zhao Qiu-Ji;Wu Ling;Meng Wei;Jiao Zhi-Hui;Li Zhi-Guo;Ren Chi
分类号 H01L27/115 主分类号 H01L27/115
代理机构 WPAT, PC 代理人 WPAT, PC ;King Justin
主权项 1. A semiconductor device, comprising: a substrate, at least comprising a memory area, a high-voltage area and a logic area; a plurality of memory cells, disposed on the memory area; a logic gate electrode, disposed on the logic area; and a high-voltage gate electrode, having a first portion and a second portion in contact with each other and stacked on the high-voltage area, wherein the high-voltage gate electrode has a thickness substantially greater than that of the logic gate electrode.
地址 Hsinchu TW