METHOD AND APPARATUS FOR DETECTING WATER ENTRAPMENT IN A VACUUM CHAMBER

摘要

During a vacuum evacuation of a chamber, the presence of water in the chamber can be detected by monitoring the pressure level in the chamber. In the absence of water, the pressure will decrease continuously and smoothly. If water is present, the pressure will rise slightly one or more times, especially as the pressure falls below 5 torr. This rise in pressure can be detected to signal the unwanted presence of water in the chamber. The method has particular application to ensuring the chamber is free of water during the evacuation of a chamber employed in vapor or vapor/plasma sterilization.