| 摘要 |
PROBLEM TO BE SOLVED: To accurately control a flow of a pressured fluid, by providing a suction quantity controlling means which electrically controls the flow of the pressured fluid which is sucked by a suck back mechanism which sucks the pressured fluid in a flow path with negative pressure action of a flexible member, and controlling this according to displacement of a flexible member. SOLUTION: When an on/off valve 26 is turned on with a pressured fluid which is fed to a cylinder chamber 48 through a flow controlling means 115a, a coating liquid flows along a flow path 38 and is dripped onto a semi- conductive wafer. After a prescribed amount of the coating liquid is coated, the on/off valve 26 is turned off, a diaphragm 80 of a such back mechanism 28 is raised to generate negative pressure action, and the liquid is prevented from dripping onto the semi-conductive wafer. By detecting displacement of the diaphragm 80 by an encoder 93 through a shaft 83, and by switching on/off conditions of an solenoid valve 106 by a main control unit 108 on the basis of the detection signal, pressure in a diaphragm 82 is adjusted. |
