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发明名称
Process for crystal growth of III-V group compound semiconductor
摘要
申请公布号
EP0662532(B1)
申请公布日期
1999.04.07
申请号
EP19950300043
申请日期
1995.01.05
申请人
SUMITOMO CHEMICAL COMPANY LIMITED
发明人
MATSUDA, YOSHINOBU;HATA, MASAHIKO;FUKUHARA, NOBORU;ISHIHARA, TOSHIO
分类号
C30B25/02;H01L21/205;(IPC1-7):C30B25/02;C23C16/30
主分类号
C30B25/02
代理机构
代理人
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