TABLE FOR HOLDING PROCESSING OBJECT AND PROCESSING DEVICE HAVING THE TABLE

摘要

PROBLEM TO BE SOLVED: To prevent a treatment liquid as much as possible from being sucked into small holes of a table intended to vacuum-suction a substrate.SOLUTION: There is provided a wet-type substrate processing device for processing a substrate. The wet-type substrate processing device includes: a table for holding the substrate; and a treatment liquid feeding mechanism for feeding a treatment liquid to the substrate held by the table. The table includes: a support surface for supporting the substrate; first aperture parts formed in the support surface; second aperture parts formed in the support surface and disposed so as to at least partly surround the first aperture parts; a first fluid channel extending through the table to the first aperture parts of the support surface and constituted to be connectable to a vacuum source; and a second fluid channel extending through the table to the second aperture parts of the support surface and constituted to drain the treatment liquid.SELECTED DRAWING: Figure 3A