发明名称 STRATIFIED COMPOSITE DIELECTRIC AND METHOD OF FABRICATION
摘要 <p>An interconnect platform and its method of fabrication is presented. The interconnect platform of the present invention includes a metal conductor (326), a dielectric layer (310, 320), and a buffer layer (308, 324) separating at least one interface between the conductor and the dielectric layer when the buffer has a lower modulus of elasticity than the dielectric layer.</p>
申请公布号 WO9920089(A1) 申请公布日期 1999.04.22
申请号 WO1998US21427 申请日期 1998.10.09
申请人 ZMS, LLC 发明人 SOANE, DAVID, S.
分类号 B32B15/08;B32B25/04;H05K1/02;H05K3/00;H05K3/38;H05K3/46;(IPC1-7):H05K1/11;H01L23/14;H01L23/12;B32B9/00 主分类号 B32B15/08
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