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发明名称
MANUFACTURE OF LAMINATED SUBSTRATE
摘要
申请公布号
JPH11163307(A)
申请公布日期
1999.06.18
申请号
JP19970328286
申请日期
1997.11.28
申请人
SUMITOMO SITIX CORP
发明人
TOMITA SHINICHI
分类号
H01L27/12;H01L21/02;(IPC1-7):H01L27/12
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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