| 发明名称 |
PROCEDE DE FABRICATION D'UNE SOURCE D'ELECTRONS A MICROPOINTES, A GRILLE DE FOCALISATION AUTO-ALIGNEE |
| 摘要 |
The invention concerns a method for making an electron source with microtips (67), with extraction grid and with focusing grid. Said method enables to align accurately the extraction grid (65) holes (61) with the focusing grid (66) openings using a single photolithography step, that which enables to produce the extraction grid holes. The invention is useful for producing a microtip electron source for flat display.
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| 申请公布号 |
FR2779271(A1) |
申请公布日期 |
1999.12.03 |
| 申请号 |
FR19980006607 |
申请日期 |
1998.05.26 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
PERRIN AIME;MONTMAYEUL BRIGITTE;BLANC REGIS |
| 分类号 |
H01J3/02;H01J9/02;(IPC1-7):H01J9/02;H01J1/30;H01J31/12 |
主分类号 |
H01J3/02 |
| 代理机构 |
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| 主权项 |
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