OSCILLATION-TYPE CONTACT SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an oscillation-type contact sensor capable of measuring the measurement location of an object to be measured without error. SOLUTION: The oscillation-type contact sensor is provided with an oscillator 3 with an oscillator main body 3B and a contact part 3A supported by a stylus holder 2, a shaking means 4 to oscillate the oscillator 3 uniaxially in a resonant state, and a detecting means 5 to detect changes in the oscillation of the contact part 3A caused by its contact with an object to be measured. The contact part 3A is constituted of a needle-shaped member extended along the axis and provided at the tip part of the oscillator main body 3B. The stylus holder 2 and the oscillator main body 3B are formed of a plate-shaped body into an integral structure and is provided with approximately an axisymmetric structure about the axis of oscillation along the surface of the plate-shaped body. The oscillator 3 is supported by the stylus holder 2 at the knot of oscillation which occurs at the center in the axis of oscillation.