| 摘要 |
The sensor has an oscillation structure (2) upon which a change in angular momentum acts due to an external rotation rate. A capacitive sensor arrangement with several capacitances detects a tilt in the oscillation structure caused by the change in angular momentum. First capacitor electrodes lie opposite the oscillation structure, which acts as the second electrode, such that a tilt movement of the oscillation structure can be capacitively detected in several directions.
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