Semiconductor device having offset twisted bit lines

摘要

A compact data line arrangement (600) includes "twisted" data line pairs (604a-604c) disposed in a first direction. Each twisted data line pair (604a-604c) includes an upper segment pair (608a-608f) that is connected to a lower segment pair (610a-610f) by a twist structure (612a-612c). The upper and lower segment pairs (608a-608f and 610a-610f) can be formed with a first pitch using phase-shifted lithography. The twist structures (612a-612c) are formed from a second conductive layer, and have a greater pitch than the first pitch. The twist structures (612a-612c) are generally arranged in a second direction that is perpendicular to the first direction. Selected twist structures (612b) are offset in the first direction with respect to adjacent twist structures (612a and 612c). The offset twist structures (612a-612c) allow supplemental conductive lines (618) to be formed from the first conductive layer that extend in the first direction, between adjacent offset twist structures (612a and 612b).