| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optical-characteristic measuring device by which the optical characteristics of an optical thin film can be measured with good accuracy and easily irrespective of the state on the surface of the optical thin film and to obtain a film formation apparatus, which is provided with the optical-characteristic measuring device. SOLUTION: This optical-characteristic measuring device 1 is used to measure the optical characteristics of an optical thin film having the optical characteristic. The measuring device 1 is provided with a light irradiating means 3, with which the optical thin film is irradiated with light. In addition, the measuring device 1 is provided with a condensing means 5, whose inner circumferential face is a spherical diffusion reflecting face and which condenses the light from the optical thin film. In addition, the measuring device 1 is provided with a light-detecting means 7 which detects a quantity of light condensed by the condensing means 5. In addition, the measuring device 1 is provided with a measuring means 9, which measures the optical characteristic of the optical thin film on the basis of the quantity of light by the light-detecting means 7. Then, the optical characteristic of the optical thin film as an object, to be measured, which is conveyed continuously is measured.
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