| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe system including a capability remodeled so as to resist excessive displacement.SOLUTION: A contact probe includes a stylus 301, a sensor, and two parallel substantially planar plates. The stylus 301 has a contact. The sensor has a substantially planar shape and includes a fixed part 302a, at least three thin-walled parts each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable part 340 mounted with the stylus 301 and linked to the fixed part 302a via the thin-walled parts in at least three locations. The two parallel substantially planar plates are connected to both sides of the movable part and sandwich the movable port therebetween so as to maintain a predetermined distance between the movable part and the two parallel substantially planar plates and limit movement of the movable part to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus 301.SELECTED DRAWING: Figure 3a |
