FUNCTIONAL THIN FILM, FUNCTIONAL SUBSTRATE AND PRODUCTION OF TITANIUM OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain a titanium oxide thin film having high durability and photocatalytic function. SOLUTION: Titanium oxide thin films 31 are made to exist at intervals on the surface of a barrier thin film 12, hydrophilic thin films 41 are formed between the titanium thin films to constitute a functional thin film 3. Since both parts to which the titanium oxide thin films 31 are exposed and parts to which the hydrophilic thin films 41 are exposed exist together on the surface of the functional thin film 31, functions of both the thin films can be obtained. Consequently a self cleaning effect and superhydrophilic nature are developed under an environment of irradiation with ultraviolet rays and a hydrophilicity of a certain degree is obtained even at a dark place. When a titanium oxide target in the titanium oxide thin films 31 is sputtered with a sputtering gas containing an oxygen gas, deficient oxygen in the titanium oxide thin film to be formed can be supplied with oxygen to form the titanium oxide thin films 31 having a photocatalytic function.