| 摘要 |
PROBLEM TO BE SOLVED: To contrive to make it possible to simply change the number of chambers and to contrive to make it possible to vertically move rapidly the chambers in a simple structure. SOLUTION: This structure is a chamber structure for receiving treating liquids, wherein a recovery tower 19 formed by superposing annular containers 15 to 17 in a plurality of steps is arranged on the periphery of a support 11 to rotate a thin plate disc material, and the treating liquids subsequent to a treatment of the thin plate disc material are recovered by kind. Here, with vent parts for releasing exhaust gas respectively provided in the upper parts of the outer peripheral walls of the containers 15 to 17, use finished liquids draining liquid ports 33, 38 and 43 are respectively provided in the lower parts on the outsides in the interiors of the containers 15 to 17. Moreover, baffles 35 for preventing the use finished liquids to scatter from escaping from the vent parts are respectively provided on the interiors of the containers 15 to 17. Liquid flow holes 39, 44 and 44a, through which the liquids from the ports 33, 38 and 43 arranged on the upper sides of the containers 15 and 16 flow downward, are provided on the outer peripheral walls of the containers 16 and 17 excluding the uppermost step of the container 15.
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