Non destructive ultra-sound test method for detecting internal faults in cathodic pulverized targets to be deposited on substrate of integrated circuit, determines real fault inclusion

摘要

The method has the following stages: (a) the dimension of the real internal fault is determined in a pulverization target material by sweeping it with ultrasound and recording the amplitude of the generated signal; (b) a metallurgical measurement is made of the internal fault dimension by exposing it; (c) the measurement is correlated with the metallurgical measurement to obtain a correlation factor for the material of the target, the factor when multiplied by future ultrasound measurement for a fault gives the real dimension of the fault.