| 摘要 |
PROBLEM TO BE SOLVED: To reduce the running cost of an ultraviolet-ray irradiation device using an excimer lamp by reducing the consumption of an inert gas and cooling water necessary for operating the device. SOLUTION: A method for ultraviolet-ray irradiation includes a step of preparing a lamp device equipped with an excimer lamp 11 in a hermetically sealed enclosure 12 having a light transmitting window 13, a step of setting a work W in such a way that its surface to be worked is irradiated with ultraviolet rays from the lamp 11, and a step of filling up the enclosure 12 with an inert gas by introducing the inert gas into the enclosure 12 in parallel with the step of setting the work W. This method also includes a step of cleaning or reforming the work W by irradiating the work W with the ultraviolet rays in a state where the introduction of the inert gas is stopped, and a step of discharging the gas from the enclosure 12 after the cleaning or reforming of the work is completed. By repeating the these steps, a plurality of works is cleaned or reformed.
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