摘要 |
<p>The present invention provides a ceramic heater having better anti thermal shock property. A ceramic substrate 12 is formed by providing heat generation bodies 14a and 14b on the surface of a green sheet made from a slurry containing powdered ceramics, sandwiching the green sheet with other green sheets from both upper and lower sides and then laminating and pressing the compiled green sheets. At least some of the heat generation bodies 14a and 14b are disposed on a level P1b offset from a level P1a of other heat generation bodies in the direction of thickness of the ceramic substrate 12. <IMAGE></p> |