| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam profile monitor with a simple structure which can detect a beam profile accurately and with high sensitivity without furnishing a suppressor electrode. SOLUTION: A suppressor power source E1 or E2 is provided for applying a direct-current suppressor voltage between a wire electrode X1, X2 to Y10 and an earth, and at same time, capacitors C1 to C3 charged by the voltage between each wire electrode and the earth and a resistor R2 for discharging a load of the capacitors are provided. Thus, an electric potential of each wire electrode is enabled to be measured with accuracy by measuring terminal voltages of capacitors C1 to C3 by a voltage measuring part 23, without furnishing a suppressor electrode. Load of the capacitors C1 to C3 is discharged through the resistor R2 and the terminal voltage is lowered before measurement, and so, a high resolution measurement of voltage is realized with the lowered range of voltage measured.
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