摘要 |
PROBLEM TO BE SOLVED: To improve the occupation of volume of a coil conductor line in a plane coil having a coil conductor line on an insulation substrate and to make the sectional shape and size of the coil conductor line to be uniform regardless of the position in the coil. SOLUTION: This method for manufacturing a plane coil includes a step for forming a base conductor layer for forming a base conductor layer on an insulation substrate, a step for forming a resist pattern for forming a resist pattern in a manner that the surface of the base conductor layer is spirally exposed, a first electroplating step for a central conductor having an almost square section by conducting an electroplating using the base conductor layer as a base, a step for peeling off the resist pattern, and a second electroplating step for completing a coil conductor line comprising the central conductor and surface conductor layer covering it by forming the surface conductor layer through electroplating using the central conductor as a base.
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