APPARATUS FOR PREVENTING DAMAGE TO LIFT PIN OF WAFER HANDLING SYSTEM IN EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for preventing damage to a lift pin of a wafer handling system in equipment for manufacturing a semiconductor is provided to prevent wafer damage like wafer scratch generated in handling a wafer and to immediately identify and handle a problem occurring in a lift assembly, by distinguishing an individual state of the lift pin. CONSTITUTION: An impact sensor located in a proper location of a lift plate senses impact caused by contact between the lift pin and a disc site when the lift pin formed on the lift plate is in contact with the disc site in loading the wafer, and generates an impact sense signal. An impact reference value of the lift pine and the disc site is predetermined. If the impact of the impact sense signal of the lift pin and the disc site is more than the predetermined impact reference value, a lift controller generates an inner interlock signal to stop the operation of the wafer handling system.