HOLDING DEVICE, CONVEYING DEVICE, IC INSPECTION DEVICE, HOLDING METHOD, CONVEYING METHOD AND IC INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a holding device, a conveying device, an IC inspection device, a holding method, a conveying method and an IC inspection method allowing having a held component assuredly followed to an object position when the component is removed and contained. SOLUTION: A hand part 50 adapted to hold the component comprises a compliance mechanism 23 formed with a spring and an elastic body allowing having the held component followed to a face in a predetermined position.