| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for heat treating articles and a batch heat treating system in which the pressure in the reaction chamber can be controlled regardless of the number of articles being heat treated under a state where an article holder is provided with an idle region. SOLUTION: The heat treating system 1 comprises a pipe 13 for introducing a treating gas into a reaction tube 2, a pipe 17 for exhausting gas in the reaction tube 2, and a control section 21 therefor. The treating gas introduction pipe 13 is provided with a first pressure sensor 14 for measuring the pressure in the reaction tube 2 on the inlet side thereof. The exhaust pipe 17 is provided with a second pressure sensor 18 for measuring the pressure in the reaction tube 2 on the outlet side thereof. The control section 21 controls the pressure in the reaction chamber 2 such that the average pressure of a first pressure measured by the first pressure sensor 14 and a second pressure measured by the second pressure sensor 18 be equal to a specified pressure in the reaction tube 2.
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