发明名称 Ionizer for gas cluster ion beam formation
摘要 <p>A neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam. The apparatus includes an electron source, and a circularly cylindrical ionizing region that is substantially free of magnetic fields. In one embodiment of the invention, the beam is a gas cluster beam, and the electron source includes a heated filament (1000) for emitting thermions, the filament including one or more direction reversals shaped to produce self-nulling magnetic fields so as to minimize the magnetic field due to filament heating current. In another embodiment of the invention, a neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam includes at least one electron source (1402), and an elliptically cylindrical ionizing region (Fig.15). In one embodiment, the elliptically cylindrical ionizing region includes a pair of co-focal elliptically cylindrical electrodes biased so as to cause electrons emitted from the at least one electron source to orbit repeatedly through the axis of the beam to be ionized. &lt;IMAGE&gt;</p>
申请公布号 EP1255277(A1) 申请公布日期 2002.11.06
申请号 EP20010650051 申请日期 2001.05.01
申请人 EPION CORPORATION 发明人 DYKSTRA, JERALD P.
分类号 H01J27/20;H01J37/08;H01J49/04;(IPC1-7):H01J27/20;H01J27/02 主分类号 H01J27/20
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